PEG Silane is a class of PEG linkers that can be used to modify glass, silica and other surfaces via the reaction between hydroxyl group and ethoxyl silane function group. Pegylation can greatly suppress the non-specific binding of charged molecules to the modified surfaces. They have wide applications for bioconjugation, drug delivery, PEG hydrogel, crosslinker, surface functionalization, and biomems or biocompatible material development.